IXY Precision XY Stage
Key Features
- Monolithic design for Compact Size
- Dual Motors for High Throughput
- Cross roller bearing for High Stiffness
- Linear encoder for High Accuracy
Applications
- 2D Trajectory Laser Processing
- Laser Direct Image
- Optical Metrology
- Automated Microscope
Specifications
IXY100
IXY200
Travel Range
100mm
200mm
Accuracy
-P: 1.0μm
-C: 1.5μm
-P: 1.5μm
-C: 2.0μm
Bi-Repeatability(3σ)
-P: 0.3μm
-C: 0.6μm
-P: 0.5μm
-C: 0.8μm
Min. Increment Motion *1
AA: 10nm
DS: 200nm
AA: 10nm
DS: 200nm
Max. Velocity *2
200mm/s
300mm/s
Max. Acceleration *2
0.5g
0.5g
Straightness
1.5μm
3μm
Flatness
2μm
4μm
Yaw
15μrad
30μrad
Pitch*4
50μrad
100μrad
Load Capacity *3
10kg
20kg
*1 MIM depends on controller, drive, environment vibration and support frame, please contact us for details.
*2 Velocity and Acceleration depend on load, controller and drive, please contact us for details.
*3 Dynamic performance can be optimized if the exact load conditions are informed to our engineering team.
*4 Mounting surface dependent
Ordering Info
Part Number Example:
IXY200 – PAA – CMS
Order Code Description:
Series
Stroke
Scale Type
Encoder Output
Cable Out
IXY
100: 100X100
-P: Invar Based Scale
AA: Sin/Cos
-CMS: With CMS Box
200: 200X200
-C: Gold Tape Scale
DS: 100nm A/B/Z
-C01: 1m Cable
DC: Customize
-C03: 3m Cable